| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing system capable of dividing a common carrying chamber into a plurality of chambers and differing a vacuum degree in a simple constitution. SOLUTION: The processing system is provided with a plurality of processing devices 32A-32F performing prescribed processing for a workpiece W, the common carrying chamber 34 connected commonly to the plurality of the processing devices, division gate valves G30 and G31 opened and closed for dividing the common carrying chamber into the plurality of the chambers, vacuum pumps 68 and 70 provided individually by dealing with the plurality of the chambers, and a piping system 76 for connecting the exhaust side of the vacuum pump corresponding to a high-vacuum chamber for forming differential pressure in each chamber to the suction side of the vacuum pump corresponding to a low- vacuum chamber. Thereby the common carrying chamber is divided into the plurality of the chambers to differ the vacuum degree in each chamber in the simple constitution. |
