发明名称 Flat actuator or sensor with internal prestress
摘要 A flat multilayered component for use as an actuator or a sensor, is described. The flat multilayered component contains a layer of electrically activatable material, a passive middle layer disposed adjacent the layer of electrically activatable material, and a further passive material layer disposed adjacent the passive middle layer. The passive middle layer has a higher coefficient of linear thermal expansion than both of the layer of electrically activatable material and the further passive middle layer.
申请公布号 US2003048040(A1) 申请公布日期 2003.03.13
申请号 US20020080362 申请日期 2002.02.21
申请人 DREI-S-WERK PRAZISIONSWERKZEUGE GMBH & CO. 发明人 DOLLGAST BERNHARD
分类号 H01L41/09;H02N2/04;(IPC1-7):H01L41/08 主分类号 H01L41/09
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