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发明名称
SUBSTRATE TREATMENT DEVICE
摘要
申请公布号
EP0953205(B1)
申请公布日期
2003.03.12
申请号
EP19970910405
申请日期
1997.10.01
申请人
STEAG MICROTECH GMBH
发明人
OSHINOWO, JOHN
分类号
B08B3/04;H01L21/00;H01L21/304;H05K3/00;(IPC1-7):H01L21/00
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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