发明名称 Dicing machine
摘要 <p>A dicing machine of the present invention is provided with two spindles (64, 66), which are arranged parallel to one another in the direction of the Y-axis and face one another. A workpiece (W) is moved toward the spindles (64, 66) in the direction of the X-axis, and two blades (68, 70) fitted to the two spindles (64, 66) cut the workpiece (W). The two spindles (64, 66) are movable in the direction of the Y-axis, so that the two blades (68, 70) can be arranged at a desired interval. One of the spindles (64, 66) is movable in the direction of the X-axis so that the two blades (68, 70) can be arranged on the same street. Hence, desired two streets or one street can be simultaneously cut with the two blades (68, 70). <IMAGE></p>
申请公布号 EP0824056(B1) 申请公布日期 2003.03.12
申请号 EP19970113996 申请日期 1997.08.13
申请人 TOKYO SEIMITSU CO.,LTD.;KULICKE & SOFFA INVESTMENTS, INC 发明人 AZUMA, MASAYUKI
分类号 H01L21/301;B28D5/02;(IPC1-7):B28D5/02;H01L21/304 主分类号 H01L21/301
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