发明名称 SURFACE MACHINING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a surface machining apparatus capable of performing high precision control of a surface shape sufficiently and at a low cost. SOLUTION: The surface machining apparatus 1 comprises a surface plate 5 to be rotated, a workpiece hold means 31 for holding a workpiece W1, and a workpiece position change means 21. The workpiece W1 is secured in a machining position away from a rotation center O1 of the surface plate 5 by a predetermined distance, and brought into sliding contact with the rotating surface plate 5. The workpiece position change means 21 moves the workpiece hold means 31 linearly in a radial direction R1 so as to change the machining position of the workpiece W1.
申请公布号 JP2003071707(A) 申请公布日期 2003.03.12
申请号 JP20010257948 申请日期 2001.08.28
申请人 IBIDEN CO LTD 发明人 JINBO NAOYUKI
分类号 B24B7/04;B24B37/10 主分类号 B24B7/04
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