| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly-reliable height information measuring device capable of saving a time and the CPU power required for calculation by promoting efficiency of procedures for data processing. SOLUTION: In this height information measuring device, plural confocal images on a horizontal plane comprising plural pixels are imaged at mutually different plural height positions in the height direction of a sample, and height information of an object in the sample is acquired based on the plural imaged confocal images. The device has a resistor comparison means 105 for comparing brightness information of each pixel of the plural confocal images, to thereby determine the maximum brightness, a particle analytical means 107 for executing particle analysis by using confocal pixel data including a pixel having the determined maximum brightness, to thereby extract a specific region, and a height calculation means 108 for calculating representative values of the brightness and the height in the extracted region. |
