HIGH VOLTAGE SURGE RESISTOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A high voltage surge resistor and a method for manufacturing the same are provided to extend the range of resistance value and stabilize the film thickness by depositing the film of the resistor through the three stages. CONSTITUTION: A method for manufacturing films of a high voltage surge resistor comprises a first step of forming a first layer made of a metal containing chrome and silicon on a ceramic element, while injecting argon and nitrogen gases under a vacuum atmosphere; a second step of forming a second layer on the first layer, while injecting only the argon gas under a vacuum atmosphere; and a third step of forming a third layer on the second layer, while injecting argon and nitrogen gases under a vacuum atmosphere.