发明名称 WORKING LIQUID SUPPLYING MECHANISM
摘要 PROBLEM TO BE SOLVED: To solve the problem of blowout of a working liquid from a blowout nozzle being delayed, when supplying the working liquid from a supply source or working liquid is dripped from the blowout nozzle during the stop of supply in a working liquid supplying mechanism, for supplying the working liquid from the supply source through a channel to the blowout nozzle in a working region. SOLUTION: On a channel (16) located close to a blowout nozzle (14), a valve means (20) is provided for stopping the flow-out of the working liquid in the channel (16) toward the blowout nozzle (14), when supplying no working liquid from a working liquid supply source (18), and for permitting the flow-out by being opened by the flow of the working liquid when that working liquid is supplied.
申请公布号 JP2003068680(A) 申请公布日期 2003.03.07
申请号 JP20010257527 申请日期 2001.08.28
申请人 DISCO ABRASIVE SYST LTD 发明人 MABASHI TAKAYUKI
分类号 B23Q11/10;B24B27/06;H01L21/301;(IPC1-7):H01L21/301 主分类号 B23Q11/10
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