DEFECT SHAPE OBSERVING METHOD AND DEFECT INSPECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To solve the problem that the precision of the position coordinate of a defect is not good compared with a case when the defect in the substrate where an element pattern is formed is observed, since fine alignment cannot be performed when the defect occurs on the surface of a blank substrate without the element pattern. SOLUTION: The position coordinate of the defect can precisely be decided when the defect occurring on the surface of the blank substrate without the element pattern is observed by forming a mark by a laser marker. The precision of defect position alignment improves and a time required for the observation of the defect can be shortened in SEM observing a defect shape. Consequently, the defect shape can easily be observed.