发明名称 COATING SOLUTION FOR FORMING FERROELECTRIC THIN FILM AND FERROELECTRIC THIN FILM
摘要 PROBLEM TO BE SOLVED: To provide coating solution to form a ferro-electric thin film on a substrate. SOLUTION: The coating solution for forming ferro-electric thin film, which contains (A) compound containing boron atoms and (B) organo-metallic compound having at least one selected from Ta, Bi, Sr, Nb, Pb, Zr and Ti as a constituent element.
申请公布号 JP2003068730(A) 申请公布日期 2003.03.07
申请号 JP20010256557 申请日期 2001.08.27
申请人 JSR CORP 发明人 IKEDA NORIHIKO;SHINODA TOMOTAKA;KOMATSU SATOSHI;YAMADA KINJI
分类号 H01L21/8247;H01B3/12;H01L21/316;H01L21/8242;H01L21/8246;H01L27/105;H01L27/108;H01L29/788;H01L29/792 主分类号 H01L21/8247
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