发明名称 BONDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a bonding device which can calculate an accurate pad position in spite of expansion of IC chip by heat and can calculate the lead position of a bonded part without detecting each lead position by a lead locator. SOLUTION: A bonding position is calculated by operating a step to calculate a fixed point on a XY orthogonal axis by deviation volumes of at least 3 locations detected by a deviation volume detecting means, a step to calculate the scale element values of a X axis and a Y axis, skew element values of the X axis and the Y axis and offset values of the X axis and the Y axis of a conversion matrix (scaling matrix) by a reference position of the fixed point and a position which the fixed point detects.
申请公布号 JP2003068787(A) 申请公布日期 2003.03.07
申请号 JP20010253499 申请日期 2001.08.23
申请人 KAIJO CORP 发明人 ISHII IWAO;YASUDA TAMANARI
分类号 H01L21/60 主分类号 H01L21/60
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