| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic multilayer film which can manufacture a magnetic head having excellent high frequency properties, without soft magnetic properties deteriorating and without reproduction properties dropping even in film manufacture of an Fe microcrystal alloy film. SOLUTION: This magnetic multilayer film is made by stacking a magnetic film having composition shown by FeaMbTcAd and any one kind of metallic film among Pt, V, Zr, Mo, Ta, W, Cu, Cr, Rh, Ir, Pd, Ti, and Ru. However, in the above composition formula, M is at least one kind among Si, Al, Ge, and Ga, and T is at least one kind of element among Ti, Ta, Hf, Zr, and Nb, and A is at least one kind of element among O and N. It is conditioned that (a), (b), (c), and (d) should each fulfill a+b+c+d=100, 1<=b<=25, 1<=c<=15, and 3<=d<=25.
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