| 摘要 |
<p>A piezoelectric functional part, comprising a substrate, a buffer layer on the substrate, a lower electrode layer on the buffer layer, a piezoelectric layer on the lower electrode layer, and upper electrode layers on the piezoelectric layer, wherein a skirt part projected in the outer peripheral direction is formed on the lower outer peripheral surface of the piezoelectric layer, whereby the fitting strength of three types of stacked bodies, i.e., the upper and lower electrode layers and the piezoelectric layer on the substrate can be increased.</p> |
