Preparation of ferroelectric lead-zirconium-titanium oxide film comprises preparing pre-mixed reagent solution, evaporating to form precursor vapor, and introducing vapor into chemical vaporization chamber containing the substrate

摘要

Preparation of a ferroelectric lead-zirconium-titanium oxide (PZT) film on a substrate (22) comprises: (1) preparing a pre-mixed reagent solution containing a mixture of a lead precursor, a titanium precursor and a zirconium precursor in a solvent medium; (2) evaporating the reagent solution to form a precursor vapor; and (3) introducing the vapor into a chemical vaporization chamber (12) containing the substrate.