| 摘要 |
PROBLEM TO BE SOLVED: To realize an inspection apparatus and an inspection method capable of contributing to cost reduction. SOLUTION: Analog sinusoidal signals outputted from a low-pass filter LPF that is incorporated in an LSI 1 are A/D-converted, and at least one cycle sinusoidal data thus obtained are stored in an internal memory. Based on the program processing by a digital tester 3, the difference between at least one sinusoidal data (measurement values) stored at the internal memory and ideal sinusoidal data (ideal values) that are calculated based on an amplitude level, phase, and neutral point potential obtained from the sinusoidal data is obtained for each sample point. Then, it is judged that an LSI is acceptable when the difference for every sample point is within a reference range, and is judged that the LSI is unacceptable when either difference is not within the reference range, thus efficiently achieving measurement inspections capable of reducing the inspection man-hours and contributing to cost reduction.
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