OPTICAL DEFLECTOR, ITS MANUFACTURING METHOD, OPTICAL SCANNING MODULE, OPTICAL SCANNER, IMAGE FORMING APPARATUS AND IMAGE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical deflector in which a movable mirror can be difficult to undergo flexural deformation in spite of the thinness of the movable mirror consequently can be made thin thereby the movable mirror can be subjected to reciprocal vibration at large amplitude with small power, its manufacturing method, an optical scanning module, an optical scanner, an image forming apparatus and an image display device. SOLUTION: In this optical deflector in which the movable mirror 100 is formed integrally with a torsion bar 101 for journaling the movable mirror and light beams are deflected by reflecting the light beams with the movable mirror 100 that is subjected to reciprocal vibration, the movable mirror 100 can be difficult to undergo flexural deformation when the movable mirror performs reciprocal vibration in spite of the thinness of the movable mirror 100 by making the movable mirror 100 curved to be of an arch type inside a cross section including at least the torsion bar 101, and reciprocal vibration can be performed at large amplitude with small power because the movable mirror 100 can be made to be thin.