| 摘要 |
PURPOSE: Provided is a lithographic projection apparatus with an actuator having a back iron of reduced mass but no loss of performance of the actuator. CONSTITUTION: Each of magnet sub-assemblies is arranged such that the component magnets are adjacent to one another in the first direction, as defined above. In this arrangement, a subsidiary magnet is located on either side of each of the main magnets. The first main magnet(2) of the first magnet sub-assembly(1) is located between the first subsidiary magnet(5) and the third subsidiary magnet(4) of the first magnet sub-assembly. Similarly, the second main magnet(7) of the first magnet sub-assembly(1) is located between the second subsidiary magnet(4) and the third subsidiary magnet(3). The second magnet sub-assembly is arranged in a similar fashion such that, in the complete magnet assembly, the corresponding magnets in the two sub-assemblies(1,11) are facing each other.
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