CRYSTALLINE THIN FILM AND MANUFACTURING METHOD THEREFOR, ELEMENT USING THE CRYSTALLINE THIN FILM, CIRCUIT CONSTITUTED BY USING THE ELEMENT AND DEVICE INCLUDING THE ELEMENT OR THE CIRCUIT

摘要

PROBLEM TO BE SOLVED: To highly control crystal grain position in a crystalline thin film obtained by melting and resolidification. SOLUTION: A method for manufacturing the crystalline thin film comprises the steps of providing a small region 1 in a starting thin film 3, preferentially growing crystal grains 6 from the region 1 in melting and resolidifying by using a thin film 3, in which the size distribution of the crystal grains or a crystal cluster concentration is different from each other in the region 1 and a circumferential region 2, and controlling the positions of the grains of the thin film. Accordingly, the regions having different states from each other continuously coexist in a starting thin film, and hence the spatial position control of the crystal grains for constituting the thin film is easily realized.