| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment apparatus which reduces an installation area, which saves a space and which can be constituted flexibly. SOLUTION: The vacuum treatment apparatus comprises a first conveyance part 11 and a second conveyance part 12 which are constituted integrally. The part 11 is constituted in such a way that it comprises a first conveyance robot 21, and that it can communicate with prescribed treatment vacuum tanks 5A, 5B. The part 12 is constituted in such a way that is comprises a delivery part 30 and a second conveyance robot 22 used to delivery a substrate 6, and that it can communicate with prescribed treatment vacuum tanks 5C to 5F. The delivery part 30 in the part 12 can convey the substrate 6 to any of the part 11 and the part 12 via prescribed conveyance stages 31 to 33. |
