发明名称 |
Co-extruded compositions for high aspect ratio structures |
摘要 |
A material set that can be used for making high aspect ratio lines includes a sacrificial feedstock comprising an organic polymer, a solvent, and one or more optional additives, and a functional material that forms a ribbon with the sacrificial feedstock without the sacrificial feedstock and the functional material substantially intermixing, wherein the sacrificial feedstock has a yield strength of greater than about 100 Pa or a viscosity of greater than about 10 4 cP at a shear rate of less than about 10 sec -1 to enable the ribbon to maintain structural integrity, and the sacrificial feedstock can be removed from the ribbon, leaving the functional material in place with an aspect ratio of greater than about 0.3. |
申请公布号 |
EP2056352(A2) |
申请公布日期 |
2009.05.06 |
申请号 |
EP20080162002 |
申请日期 |
2008.08.07 |
申请人 |
PALO ALTO RESEARCH CENTER INCORPORATED |
发明人 |
ALLISON, KEVIN WARREN;FORK, DAVID K.;SHAQFEH, ERIC STEFAN GARRIDO;SOLBERG, SCOTT E. |
分类号 |
H01L31/0224;H01L31/18 |
主分类号 |
H01L31/0224 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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