STABLE ENERGY DETECTOR FOR EXTREME ULTRAVIOLET RADIATION DETECTION

摘要

A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path including a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The detector element preferably comprises Si pn diodes with doped dead region and zero surface recombination or a PtSi-nSi barrier for increasing the long term stability of the detector.