| 摘要 |
PROBLEM TO BE SOLVED: To provide an accelerometer, in which the support part of a moving substrate can be bonded easily to a fixed substrate, without strictly controlling the degree of surface roughness and the cleaning degree of the bonding face of the moving substrate to the fixed substrate, whose bonding yield is enhanced and which can be manufactured stably, and to provide a method of manufacturing the accelerometer. SOLUTION: The accelerometer is composed of the moving substrate, in which a mass body and the support part used to support a thin-wall beam part are installed integrally at least in one part of the beam part and a first fixed substrate and a second fixed substrate, which are installed respectively in positions facing the mass body and which comprise a first fixed electrode and a second fixed electrode. The manufacturing method is constituted, in such a way that a process in which an insulating layer is installed between the support part and the first and second fixed substrates and in which surfaces of the first and second fixed substrates are coated with an insulator resist is installed, that a process in which the insulator resist is exposed and developed to a shape nearly identical to the support part is installed and that a process, in which the first and second fixed substrates and the support part are heated, hardened and bonded is installed, and the support part at the moving substrate is bonded to the first and second fixed substrates. |
