| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a joined body of a ceramic to a metal with a remarkably improved productivity without damaging the surface condition of the metal and the joining state of the metal to the ceramic. SOLUTION: In the method of manufacturing the joined body by laminating >=2 units, in which one unit is a laminated body obtained by laminating a ceramic substrate and a metallic plate with or without a brazing filler metal containing an active metal, with a spacer and heating and joining while pressing the laminate in the vertical direction to the ceramic substrate, the spacer is prepared by holding a heat resistant material having >=25% compressibility at 25 MPa load and 0.1 to 2 mm thickness between silicon plates having 1.1 to 0.4 mm thickness. A pressure of >=1 MPa is applied.
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