| 摘要 |
PROBLEM TO BE SOLVED: To provide a master valve, having a flow measuring function using differential pressure flow method for precisely measuring the flow rate of consumed air in pneumatic equipment and a minute leakage flow rate. SOLUTION: In the flow path 9, connected between a first port P1 for connecting pressure air source 7 and a second port P2 for connecting the pneumatic equipment 8, a first valve 3 for switching the flow path 9 into an air intake state and an air exhausting state and a second valve 4 for switching the flow path 9 into an complete opening state, and an restricted opening state are connected in series. Then switching means 5, 6 are provided separately for switching these valves 3, 4. Additionally, a pressure sensors 28a, 28b are provide for measuring the air pressure in the first flow path 9a and the second flow path 9c to output the pressure to an arithmetic unit 2.
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