| 发明名称 |
Polishing pad and system |
| 摘要 |
The invention provides a double sided waffle-surfaced foam polishing pad and a polishing system with which it can be used. The double sided feature allows great versatility in the type of polishing that can be accomplished using the same pad.
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| 申请公布号 |
US6523215(B2) |
申请公布日期 |
2003.02.25 |
| 申请号 |
US20010826343 |
申请日期 |
2001.04.04 |
| 申请人 |
SAINT-GOBAIN ABRASIVES TECHNOLOGY COMPANY |
发明人 |
PIOMBINI ROBERT |
| 分类号 |
B24B37/00;A47L11/164;B24B23/04;B24D13/14;B24D13/20;B24D99/00;B28D5/00;(IPC1-7):B05C17/10 |
主分类号 |
B24B37/00 |
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