METHOD AND SYSTEM FOR WAFER-LEVEL TUNING OF BULK ACOUSTIC WAVE RESONATOR AND FILTER

摘要

PROBLEM TO BE SOLVED: To provide a bulk acoustic wave resonator from which a bulk acoustic wave device having a uniform operation frequency can be fabricated on a large substrate or wafer. SOLUTION: This invention relates to a method and a system for tuning the bulk acoustic wave resonator and a filter at a wafer level for correcting non-uniformity of thickness of a device to the non-uniformity of thickness of the device caused when a bulk acoustic wave device is fabricated on a large substrate or wafer, by using an etching mask having such non-uniformity of thickness as to correct the non-uniformity of the thickness.