| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for forming electrodes of aβ-FeSi2 element of the electrodes which have high reliability and will not cause disconnections. SOLUTION: In making phase transition forβ-FeSi2 material toα-Fe2 Si5 metal phase by heating the whole or a part of the surface layer of theβ-FeSi2 material in air or an inert gas atmosphere and subsequently cooling the phase- changed part to room temperature to form electrodes of high electrical conductivity, a heating source is applied to one point of the surface of a specimen loaded on a stage to change the phase toα-Fe2 Si5 , and then the heating source is moved to a next heating position, which is not a mutually adjacent position but a point at a position B which is remote enough so as not to be influenced by heat. The point in position B is heated, and during the heating, the previously heated point A is cooled. The heating source is then applied to a point, which touches the already cooled point A to make the heating/metallization. By repeating this operation of heating and cooling, a desired electrode pattern is formed by ranging the metallized parts.
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