发明名称 METHOD OF INJECTING CHANNEL ION FOR IMPROVING ROBUSTNESS OF NMOS TRANSISTOR TO ESD
摘要 PROBLEM TO BE SOLVED: To provide a MOS transistor that is hardly damaged by ESD. SOLUTION: This MOS transistor has a region having higher resistivity than the other regions in the p-type well. When an ESD phenomenon occurs, the region having the higher resistivity increases the current It2 which starts a thermal breakdown by destructive local heating by increasing the current gain of a parasitic lateral npn bipolar transistor.
申请公布号 JP2003051581(A) 申请公布日期 2003.02.21
申请号 JP20020159898 申请日期 2002.05.31
申请人 TEXAS INSTRUMENTS INC 发明人 NADAKUMAR MAHALINGAM;ZHOA SONG
分类号 H01L21/74;H01L21/336;H01L21/76;H01L21/822;H01L21/8234;H01L21/8238;H01L27/02;H01L27/04;H01L27/06;H01L27/088;H01L27/092;H01L29/10;H01L29/78;(IPC1-7):H01L27/06;H01L21/823 主分类号 H01L21/74
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