METHOD FOR MANUFACTURING OPTICAL ELEMENT, METHOD FOR MANUFACTURING STRUCTURE WITH RECESSED PART

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical element making removal of a coating film in a recessed part easy in a manufacturing step of the optical element using a substrate with the recessed part. SOLUTION: The method is provided with a film forming step to form the coating film 22 on the substrate 1 with the recessed part 21 and a removing step to remove the coating film 22 in the recessed part 21. The removing step is a step to apply a resist film 150 to the substrate 1, to expose the resist film 150 using a photomask with a desired pattern, subsequently to remove the resist film 150 in the recessed part 21 by developing and remove the coating film 22 using the remaining resist film 150 as an etching mask. In this case, the resist film 150 is formed with a negative resist so as to make the recessed part 21 a non-exposed part on exposure.