METHOD AND DEVICE FOR FEEDING ARSENIC DOPANT INTO A SILICON CRYSTAL GROWING PROCESS,申请号KR20027015127-传众专利搜索

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发明名称	METHOD AND DEVICE FOR FEEDING ARSENIC DOPANT INTO A SILICON CRYSTAL GROWING PROCESS
摘要
申请公布号	KR20030015239(A)	申请公布日期	2003.02.20
申请号	KR20027015127	申请日期	2002.11.11
申请人		发明人
分类号	C30B15/04;C30B29/06	主分类号	C30B15/04
代理机构		代理人
主权项
地址

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