Verfahren zum Abrichten eines Polierkissens.,申请号DE1998610686-传众专利搜索

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发明名称	Verfahren zum Abrichten eines Polierkissens.
摘要
申请公布号	DE69810686(D1)	申请公布日期	2003.02.20
申请号	DE1998610686	申请日期	1998.04.09
申请人	KABUSHIKI KAISHA TOSHIBA, KAWASAKI	发明人	MIYASHITA, NAOTO;MINAMI, YOSHIHIRO
分类号	B24B37/04;B24B53/017;H01L21/304;(IPC1-7):B24B37/04;B24B53/02	主分类号	B24B37/04
代理机构		代理人
主权项
地址

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