发明名称 |
CONNECTION STRUCTURE FOR VACUUM PUMP |
摘要 |
PURPOSE: To provide a connection structure for a vacuum pump that can interrupt transmission of electrical noise generated by a vacuum pump body. CONSTITUTION: An electrically insulating part 7 for electrically insulating opposite piping ends from each other by means of an electrically insulating material is interposed in connecting piping between a vacuum pump 101 and a vacuum chamber 103 of suction-connected equipment. The electrically insulating part 7 may be arranged on a piping connecting member such as a mechanical vibration absorbing damper 1 (a valve 11 in a connection structure). The periphery of the electrically insulating part 7, if necessary, has a protective cover 9 adapted to the vacuum pump 101.
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申请公布号 |
KR20030014617(A) |
申请公布日期 |
2003.02.19 |
申请号 |
KR20020046519 |
申请日期 |
2002.08.07 |
申请人 |
BOC EDWARDS TECHNOLOGIES LIMITED |
发明人 |
ISHIKAWA TAKAHARU;YAMAUCHI AKIRA |
分类号 |
F04D29/02;F04B37/16;F04D19/04;F04D29/42;F04D29/44;F04D29/60;F04D29/66;(IPC1-7):F04D29/00 |
主分类号 |
F04D29/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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