,申请号JP19990066470-传众专利搜索

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发明名称
摘要
申请公布号	JP3376946(B2)	申请公布日期	2003.02.17
申请号	JP19990066470	申请日期	1999.03.12
申请人		发明人
分类号	H01L21/203;C23C14/34;C23C14/54;H01L21/285;(IPC1-7):C23C14/34	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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