| 发明名称 |
SUBSTRATBEHÄLTER MIT SCHUTZ GEGEN PHYSISCH- CHEMISCHE KONTAMINATION |
| 摘要 |
The invention relates to a storage box for an object that is to be protected from physicochemical contamination. The storage box is intended to have low weight, good mechanical strength, a good electrical condition, with a low degassing rate in time with prevention of diffusion of gasses from the external atmosphere into the interior of the box. The inner and/or outer surface of the box's walls are coated with at least one protective layer. The box may be used to store silicon wafers. |
| 申请公布号 |
AT232014(T) |
申请公布日期 |
2003.02.15 |
| 申请号 |
AT19960939148T |
申请日期 |
1996.11.19 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;L'AIR LIQUIDE, S.A. A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
SPINELLI PHILIPPE;DOCHE CLAUDE;ROSTAING JEAN-CHRISTOPHE;COEURET FRANCOIS;SCOTTO D APOLONIA SYLVAIN |
| 分类号 |
B65D85/86;H01L21/673;(IPC1-7):H01L21/00 |
主分类号 |
B65D85/86 |
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