| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin processing apparatus which can suitably process the lower surface of a substrate. SOLUTION: The apparatus includes a cup member, a rotor disposed within the cup member to be rotatably driven, a holding member provided to the rotor for removably holding a substrate, a nozzle head 46 disposed on a side of the lower surface of the substrate held by the holding member, lower processing solution nozzles 55A to 55C provided to the nozzle head for ejecting a processing solution obliquely toward the radial center of the lower surface of the substrate, and lower gas nozzles 56A and 56B provided to the nozzle head and positioned as shifted in the circumferential direction of the substrate from a radial direction of the lower nozzles and nozzle head, for ejecting a gas obliquely toward the radial center of the lower surface of the substrate.
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