ELECTRON EMISSION BODY AND MANUFACTURING METHOD, COLD- CATHODE FIELD ELECTRON EMISSION ELEMENT AND MANUFACTURING METHOD, AS WELL AS COLD-CATHODE FIELD ELECTRON EMISSION DISPLAY DEVICE AND MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a cold-cathode field electron emission element which can form a carbon thin film even at low temperature, and yet with excellent cold- cathode field electron emission characteristics. SOLUTION: The cold-cathode field electron emission element consists of (A) a cathode electrode 11 set up on a support body 10 and (B) a plurality of conical electron emission bodies 26 formed on the cathode electrode 11, and the electron emission bodies 26 is structured with a base part 24 made of a conical metal silicide 23 formed on the cathode electrode and a carbon thin film 25 formed on the surface of the base part 24.