发明名称 |
Thin film forming method and apparatus |
摘要 |
To provide a thin film forming method and apparatus that can automatically form thin films having constant optical properties with high reproducibility Antireflection films are deposited on lenses 2a that are held by a coating dome 2 by vaporizing an evaporation material 4 by using an electron gun 3 The power to be applied to the electron gun 3 is controlled so that a transmission or reflection light quantity value that is measured at each time point by an optical film thickness meter 10 becomes equal or approximately equal to a standard light quantity value stored in a standard light quantity value data storing means
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申请公布号 |
US2003029382(A1) |
申请公布日期 |
2003.02.13 |
申请号 |
US20020259635 |
申请日期 |
2002.09.30 |
申请人 |
TAKAHASHI YUKIHIRO;SHINDE KENICHI |
发明人 |
TAKAHASHI YUKIHIRO;SHINDE KENICHI |
分类号 |
C23C14/54;(IPC1-7):C23C16/00;H01L21/00 |
主分类号 |
C23C14/54 |
代理机构 |
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