发明名称 SYSTEMS AND METHODS FOR MEASURING PROPERTIES OF CONDUCTIVE LAYERS
摘要 <p>A pin (10) configured to be disposed within a probe (110) is provided. The probe (110) may be configured to measure a property of a conductive layer. The pin (10) may include a contact surface (12) which may be substantially planar. The pin (10) may also include a first portion (14) extending from the contact surface (12). A cross-sectional area of the first portion, in a direction substantially parallel to the contact surface, may be substantially equal to a surface area of the contact surface (12) across a length of the first portion (14). A system (108) configured to measure a property of a conductive layer is also provided. The system (108) may include a mounting device (112) and at least two probes (110) coupled to the mounting device (112). The probes may be configured to measure the property of a conductive layer. In addition, the mounting device (112) may be configured such that one of the probes (110) may contact the conductive layer during measurement.</p>
申请公布号 WO2003012828(A2) 申请公布日期 2003.02.13
申请号 US2002028954 申请日期 2002.04.09
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