发明名称 NEGATIVE PHOTORESIST COMPOSITION FOR THICK FILM, PHOTORESIST FILM AND METHOD FOR FORMING BUMP BY USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a negative photoresist composition for a thick film which has high sensitivity and preferable durability against plating and which is suitable for formation of a thick film preferable as a material to form bumps, and to provide a photoresist film and a method for forming bumps by using the photoresist film. SOLUTION: The negative photoresist composition for a thick film contains (A) a novolak resin, (B) a plasticizer, (C) a crosslinking agent and (D) an acid producing agent. The photoresist film having 5 to 100 μm film thickness is obtained by applying the above composition on a base material and drying. In the method for forming bumps, the above composition is applied on the substrate of electronic parts, patterned and subjected to plating.
申请公布号 JP2003043688(A) 申请公布日期 2003.02.13
申请号 JP20020110282 申请日期 2002.04.12
申请人 TOKYO OHKA KOGYO CO LTD 发明人 SAITO KOJI;MISUMI KOICHI;OKUI TOSHIKI;KOMANO HIROSHI
分类号 G03F7/038;G03F7/004;H01L21/027;H01L21/60 主分类号 G03F7/038
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