| 摘要 |
PROBLEM TO BE SOLVED: To provide a resistor with homogeneous small tan δ, and little fluctuation in the same series of products even in the case of the diameter or thickness of a substrate is large, and to provide its manufacturing method and its holding device capable of processing the held product uniformly. SOLUTION: The resistor is made of a ceramic sintered compact. The mean value of the relative density of which is measured at a plurality of parts including a peripheral part and a center part, is >=98%, the mean value of volume resistivity value is <=10<7> -10<12> Ωcm at 50 deg.C, the mean value of dielectric loss is <=50×10<-4> at 1 MHz and difference between maximum value and minimum value of the dielectric loss is <=50% of the mean loss value. So, in the case of processing the held product held with a electrostatic chuck 1, the fluctuation of processing in the same surface even for the large product such as the maximum diameter is >=200 mm and thickness is >=0.5 mm, can be made small. |
