摘要 |
A microscopic analysis apparatus for analysis of infrared single beam spectrum is composed of an interference light source unit, a measuring unit, and a signal processing unit. The measuring unit is configured such that a semi-spherical prism made from germanium, an incident angle varying device composed of a pair of opposed parabolic mirrors, and a detector for sensing light totally reflected from the surface of a sample are provided in an enclosed sample chamber. According to the method using the analysis apparatus, a profile of a concentration of an organic lubricant contained in a sample in the depth direction of the sample is measured by bringing the surface on the magnetic layer formation side of a floppy disk as the sample into press-contact on the bottom surface of the prism at a low pressure, scanning an incident angle of an infrared light ray on the prism, and analyzing the spectrum of the infrared light ray totally reflected from the surface of the sample. |