| 摘要 |
PROBLEM TO BE SOLVED: To provide a tube structure in which the tube is hardly broken even if the pressure in the tube is reduced. SOLUTION: In this reaction tube 58, an upper outside wall part 58a and a lower outside wall part 58b are formed in an arched shape between right and left side wall parts 58c, 58d, and in the inside of both outside wall parts 58a, 58b, an upper inside wall part 58e and a lower inside wall part 58f are formed extending in the horizontal direction in a planar shape between right and left side wall parts 58c, 58d. In a space 84 between the upper outside wall part 58a and the upper inside wall part 58e, a process gas supply pipe 88 is connected through a gas inlet formed on the back face of the reaction tube. In a space 86 between the lower outside wall part 58b and the lower inside wall part 58f, an exhaust pipe 90 is connected through an exhaust outlet formed on the back face of the reaction tube. In the upper inside wall part 58e and the lower inside wall part 58f, vent holes or slits are arranged to pass the process gas and the exhaust gas respectively.
|
