发明名称 SYSTEM AND METHOD FOR PRODUCT QUALITY INFORMATION MANAGEMENT
摘要 <p>PROBLEM TO BE SOLVED: To provide a product quality management method for products such as reticle used for manufacturing semiconductor device so that users who have acquired products can also obtain easily the data of such products. SOLUTION: A particular pattern 3 which is the intrinsic code of a product 1 or its accessory 4 is given to the product 1 or to the accessory 4. The particular pattern 3 is converted into a authentication code. Therefore, it is possible to log in to a quality database 5 of the product 1 using the authentication code.</p>
申请公布号 JP2003037037(A) 申请公布日期 2003.02.07
申请号 JP20010221371 申请日期 2001.07.23
申请人 FUJITSU LTD 发明人 SAKA TAKETORA;TSUBAKIDA OSAMU
分类号 G03F1/38;G03F1/62;G03F1/68;H01L21/027;(IPC1-7):H01L21/027;G03F1/14;G03F1/08 主分类号 G03F1/38
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