发明名称 Structure and method for fabrication for a lighting device
摘要 A lighting device suitable for low power applications, such as backlighting a liquid crystal display (LCD), includes plural light emitting components and photovoltaic elements formed on a monocrystalline silicon substrate. To fabricate the lighting device, high quality epitaxial layers of monocrystalline materials can be grown overlying the silicon substrate by forming a compliant substrate for growing the monocrystalline layers. One way to achieve the formation of a compliant substrate includes first growing an accommodating buffer layer on a silicon wafer. The accommodating buffer layer is a layer of monocrystalline oxide spaced apart from the silicon wafer by an amorphous interface layer of silicon oxide. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. The accommodating buffer layer is lattice matched to both the underlying silicon wafer and the overlying monocrystalline material layer.
申请公布号 US2003026310(A1) 申请公布日期 2003.02.06
申请号 US20010921895 申请日期 2001.08.06
申请人 MOTOROLA, INC. 发明人 VALLIATH GEORGE
分类号 G02F1/13357;H01L21/20;H01L31/12;H01L31/153;H01L31/18;H01S5/02;H01S5/026;H01S5/183;(IPC1-7):H01S5/00 主分类号 G02F1/13357
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