| 摘要 |
PURPOSE: A temperature controller for semiconductor fabrication equipment is provided to maintain constantly temperature of a chamber though an error is generated from a temperature control portion. CONSTITUTION: A temperature controller(100) includes a temperature control portion(115), an interface portion(120), and a heating portion(130) in order to maintain constantly temperature of a chamber(C) formed with a cathode(A) and a wall(B). The temperature control portion(115) compares a reference temperature of chamber(C) with a measured temperature of a thermocouple and output a temperature control signal. The interface portion(120) stores the temperature control signal of the temperature control portion(115) and outputs the temperature control signal when the temperature control portion(115) is in an abnormal state. The heating portion(130) is formed with a power source portion(140), a power supply portion(150), and a heater(160).
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