| 摘要 |
PURPOSE: To obtain a positive photosensitive compsn. having high photosensitivity and usable under light in a wide wavelength range by incorporating a specified three-dimensionally crosslinked resin and a compd. which is decomposed by irradiation with active light or radiation to generate an acid. CONSTITUTION: This photosensitive compsn. contains a three-dimensionally crosslinked resin (a) having at least one of units represented by formulae I-III as structural units decomposable by an acid and a compd. (b) which is decomposed by irradiation with active light or radiation to generate an acid. In the formulae I-III, each of R<1> and R<2> is H, alkyl, alkoxy, aryl or aryloxy. The compd. (b) is an o-naphthoquinonediazido compd. represented by formula IV (where A is a divalent optionally substd. aliphatic residue or a divalent optionally substd. arom. residue). |
