| 摘要 |
PROBLEM TO BE SOLVED: To prevent deposition of enclosed metal in a light source lamp, make uniform the temperature of the light source lamp, prevent irregularities and deterioration in illuminance as an apparatus, and eliminate the causes for defective element in manufacturing. SOLUTION: There are nozzle 10, 11, and 12 and temperature regulating sections 14, 15, and 16 corresponding to each nozzle as a plurality of cooling means to cool a light source lamp 5. A plurality of temperature sensors 6 to 9 are provided to measure the temperature distribution of the light source lamp 5. The nozzles 10, 11, and 12 and temperature regulating sections 14, 15, and 16 can be controlled independently based on the temperature distribution of the light source lamp 5, light generated from the light source lamp 5 is used for lighting an original by transmission light, and the image of the pattern of the original is formed on a substrate surface by a projection lens system. |
