INTEGRATING SPHERE, SPECTROMETRIC INSTRUMENT USING THE SAME, EXPOSURE DEVICE, AND SPECTROMETRY

摘要

PROBLEM TO BE SOLVED: To provide an integrating sphere excellent in measuring precision for light in a far ultraviolet vacuum ultraviolet range, and a spectrometric instrument using the integrating sphere. SOLUTION: In this integrating sphere used in the instrument for measuring energy intensity of light having 300 nm or less of wavelength range, spectroscopic energy intensity thereof and a distribution thereof, a phosphor coating film 9 containing a phosphor as a wavelength converting material is provided in an incident window 2 of a hollow sphere having respectively at least the one incident window 2 for making light get incident and at least on light receiving window 5 for light receiving.