| 摘要 |
PURPOSE: Provided is a waste gas treatment device capable of preventing clogging of a gas exhaust line by preventing dust particles from being deposited in the gas exhaust line. CONSTITUTION: The waste gas treatment device comprises a heating chamber(114) for thermally decomposing waste gas exhausted from a process chamber, a cooling chamber(115) for condensing the thermally decomposed waste gas by quenching the same, a post treatment apparatus(130) for separating fine dust from a gas exhausted from the cooling chamber(115) and exhausting a purified gas, gas exhaust lines(170,171) connecting the components(114,115,130) to each other, and a gas supply line(180) coupled to a portion of the gas exhaust line(170,171) for supplying N2 gas into the gas exhaust line(170,171) and particularly coupled to a bent portion of the gas exhaust line(170,171) to increase gas flow rate in the gas exhaust line, so that dust may not be deposited in the inner surface of the gas exhaust line(170,171) because flow rate of gas is increased at the bent portion of the gas exhaust line due to the supplied N2 gas. The waste gas treatment device further comprises a dust removing line(190) having one end coupled to the bent portion of the gas exhaust line(170,171) and an opposite end coupled to a blower (B2) for blowing out dust in the gas exhaust line(170,171).
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