OPTICAL WAVEGUIDE PART AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a high performance built-in type three-dimensional optical waveguide which is simply manufacturable and a method for manufacturing the optical waveguide. SOLUTION: A core 12 is filled by the spin coat method or the like in a core pattern groove formed at a lower clad 11. An intermediate layer 13 which is of the same material as that of the core 12 is formed when the core 12 is to be filled. A thin layer upper clad 14 being a thin film is formed on the intermediate layer 13 by the spin coat method or the like. The three-dimensional optical waveguide has a decreased transmission loss and the coupling loss of the optical waveguide owing to the upper clad as a thin film in comparison to an optical waveguide which has a substrate type upper clad. Further, the intermediate layer is not removed in the manufacturing process of the three- dimensional optical waveguide so that the manufacturing process is shortened and simplified.